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Recording medium evaluation apparatus for designing a semiconductor device, evaluation method for designing a semiconductor device, the evaluation and design program of semiconductor device

机译:用于设计半导体器件的记录介质评估设备,用于设计半导体器件的评估方法,半导体器件的评估和设计程序

摘要

PROBLEM TO BE SOLVED: To realistically and precisely perform an evaluation design of semiconductor device.;SOLUTION: Gate length information 1g of pattern data 323b of a gate electrode is extracted. Distance pieces of information sg1 and sg2 of the pattern data 323b of the gate electrode from pattern data 323a and 323c of gate electrodes adjacent to the pattern data 323b is calculated. Dispersion parameters of the pattern data 323b of the gate electrode are extracted from a dispersion parameter table 254 for every edge. Dispersion information is calculated for every edge. The calculated dispersion information Dg is added to the gate length information 1g (lg=120 nm) in the description of a net list 600.;COPYRIGHT: (C)2006,JPO&NCIPI
机译:解决的问题:为了现实而精确地进行半导体器件的评估设计。解决方案:提取栅电极的图案数据323b的栅长信息1g。计算出栅电极的图形数据323b与与图形数据323b相邻的栅电极的图形数据323a和323c之间的距离信息sg1和sg2。从每个边缘的色散参数表254中提取栅电极的图案数据323b的色散参数。计算每个边缘的色散信息。在网表600的描述中,将计算出的色散信息Dg添加到栅极长度信息1g(lg = 120 nm)中。版权所有:(C)2006,JPO&NCIPI

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