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Black low thermal expansion ceramics and component null kodeieraito for the exposure

机译:黑色低热膨胀陶瓷,曝光时使用零空kodeieraito

摘要

PROBLEM TO BE SOLVED: To provide a ceramic having a low thermal expansion property, rigidity, and wear resistance, having low resistance, and having black color. SOLUTION: The ceramic contains (a) at least one kind selected from a group comprising cordierite, spodumene, and eucryptite, (b) carbon, and (c) at least one kind selected from a group which consists of a carbide, a nitride, a boride, and a silicide of a group 4a element, a group 5a element, and a group 6a element and consists of a silicon carbide, a boron carbide, and a silicon nitride. The contents of the components (a), (b), and (c) are 57-99.89 vol.%, 0.01-3.0 vol.%, and 0.1-4.0 vol.% respectively. The ceramic has the porosity of =0.5%, the volume resistivity of =108 Ωcm, and the thermal expansion coefficient at 10-40 deg.C of =1×10-6/ deg.C.
机译:解决的问题:提供一种具有低热膨胀性,刚性和耐磨性,低电阻且具有黑色的陶瓷。 SOLUTION:陶瓷包含(a)选自堇青石,锂辉石和锂霞石的至少一种,(b)碳,和(c)选自由碳化物,氮化物,硼化物,4a族元素,5a族元素和6a族元素的硅化物由碳化硅,碳化硼和氮化硅构成。组分(a),(b)和(c)的含量分别为57-99.89体积%,0.01-3.0体积%和0.1-4.0体积%。陶瓷的孔隙率<= 0.5%,体积电阻率<=108Ωcm,在10-40℃的热膨胀系数<= 1×10-6 /℃。

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