Discharge lamp, light source device, exposure apparatus, and method of manufacturing exposure apparatus

摘要

It is a light source device capable of easily mounting a discharge lamp on an attachment mechanism in a short time. A discharge lamp (1) having a glass tube (25) forming a light emitting part and a base part (26) connected thereto, and an attachment device (1) for holding the discharge lamp (1) via the base part (26) 31), the base part (26) includes a flange part (26a) that comes into contact with the positioning plate (50) of the mounting apparatus (31), and the flange part (26a) as a positioning plate (50). ) And a fixing arm (55A) for biasing the fixing portion (26h) by a compression coil spring (44A). Have