METHOD FOR TESTING ALIGNMENT OF A TEST BED WITH A PLURALITY OF INTEGRATED CIRCUITS THEREON

摘要

The invention relates to a method for testing an alignment of a carrier with respect to a plurality of integrated circuits on the carrier. The carrier has optically discernible carrier references and each integrated circuit has optically discernible circuit references. The method includes the steps of receiving the carrier in a holding assembly, sensing positions of the carrier and circuit references, and measuring the positions of the carrier and circuit references