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Rocking Y-shaped probe for critical dimension atomic force microscopy
Rocking Y-shaped probe for critical dimension atomic force microscopy
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机译:临界尺寸原子力显微镜的摇摆Y型探头
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摘要
Measuring surface profiles of structures on integrated circuits is difficult when feature sizes are less than 100 nanometers. Atomic force microscopy provides surface profile measurement capability on flat horizontal surfaces, but has difficulty with three-dimensional structures such as MOS transistor gates, contact and via holes, interconnect trenches and photoresist patterns. An atomic force microscopy probe with two atomically sharp tips configured to facilitate measurements of three-dimensional structures is disclosed. A method of making such measurements using the disclosed probe and a method of fabricating an IC encompassing the method are also claimed.
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