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Wafer level package utilizing laser-activated dielectric material

机译:晶圆级封装,采用激光激活的介电材料

摘要

A method of forming a wafer level package includes attaching a laser-activated dielectric material to an integrated circuit substrate to form an assembly, the integrated circuit substrate including a plurality of electronic components having terminals on first surfaces thereof. The laser-activated dielectric material is laser activated and ablated with a laser to form laser-ablated artifacts in the laser-activated dielectric material and simultaneously to form an electrically conductive laser-activated layer lining the laser-ablated artifacts. The laser-ablated artifacts are filled using an electroless plating process in which an electrically conductive filler material is selectively plated on the laser-activated layer to form an embedded circuit pattern within the laser-activated dielectric material.
机译:一种形成晶片级封装的方法,包括将激光激活的介电材料附着到集成电路基板上以形成组件,该集成电路基板包括在其第一表面上具有端子的多个电子部件。激光激活的介电材料被激光激活并用激光烧蚀,以在激光激活的介电材料中形成激光烧蚀的伪影,同时形成衬在激光烧蚀的伪影上的导电激光激活层。使用化学镀工艺填充激光烧蚀的伪像,在该化学镀工艺中,将导电填充材料选择性地镀在激光活化层上,以在激光活化介电材料内形成嵌入式电路图案。

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