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Hybrid crystal orientation CMOS structure for adaptive well biasing and for power and performance enhancement

机译:混合晶体取向CMOS结构,用于自适应阱偏置以及功率和性能增强

摘要

The present invention provides a semiconducting structure including a substrate having an SOI region and a bulk-Si region, wherein the SOI region and the bulk-Si region have a same or differing crystallographic orientation; an isolation region separating the SOI region from the bulk-Si region; and at least one first device located in the SOI region and at least one second device located in the bulk-Si region. The SOI region has an silicon layer atop an insulating layer. The bulk-Si region further comprises a well region underlying the second device and a contact to the well region, wherein the contact stabilizes floating body effects. The well contact is also used to control the threshold voltages of the FETs in the bulk-Si region to optimized the power and performance of circuits built from the combination of the SOI and bulk-Si region FETs.
机译:本发明提供了一种半导体结构,其包括具有SOI区域和块状Si区域的衬底,其中所述SOI区域和块状Si区域具有相同或不同的晶体学取向;隔离区,其将SOI区与体Si区分开;至少一个位于SOI区域的第一器件和至少一个位于体硅区域的第二器件。 SOI区域在绝缘层顶上具有硅层。体硅区域还包括在第二器件下方的阱区域以及与该阱区域的接触,其中该接触稳定了浮体效应。阱接触还用于控制体硅区域中FET的阈值电压,以优化由SOI和体硅区域FET组合而成的电路的功率和性能。

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