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Integrated circuit tester information processing system for nonlinear mobility model for strained device
Integrated circuit tester information processing system for nonlinear mobility model for strained device
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机译:应变器件非线性迁移率模型的集成电路测试仪信息处理系统
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摘要
A method for operating an integrated circuit tester information processing system includes: measuring current information from test structures for an integrated circuit having a stress liner; forming a transfer curve by simulating based on the current information with a first range of first mobility multipliers; forming an inverse transfer curve by applying an inverse transfer function to the transfer curve; forming a stress curve with second mobility multipliers from the inverse curve; and validating the second mobility multipliers by comparing a measured curve and a simulated curve with the measured curve based on the current information and the simulated curve based on stress curve.
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