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GAS TRANSPORT DELAY RESOLUTION FOR SHORT ETCH RECIPES
GAS TRANSPORT DELAY RESOLUTION FOR SHORT ETCH RECIPES
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机译:短蚀刻配方的气体运输延迟解决方案
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摘要
In one embodiment, an apparatus for providing a gas mixture of a plurality of gases, may have a plurality of mass flow controllers (MFCs), a mixing manifold in fluid connection with each plurality of MFCs, a plurality of mixing manifold exits positioned on the mixing manifold; and an isolation device in fluid connection with each of the plurality of mixing manifold exits.
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