WAFER TRANSPORTING SYSTEM, SEMICONDUCTOR FABRICATION PLANT STRUCTURE USING SAME, AND WAFER TRANSPORTING METHOD

摘要

The present invention relates to a wafer transporting system, a semiconductor fabrication plant (or fab) structure including same, and a wafer transporting method, and more particularly, relates to a new conceptional wafer transporting system, semiconductor fab structure including same, and wafer transporting method, wherein the equipment for the entire fabrication process installed in semiconductor fabrication lines is integrated with an automatic distribution system for transporting a wafer.