WAFER TRANSPORTING SYSTEM, A SEMICONDUCTOR FABRICATION PLANT STRUCTURE USING THE SAME, AND A WAFER TRANSPORTING METHOD, CAPABLE OF MAXIMIZING INTEGRITY

摘要

PURPOSE: A wafer transporting system, a semiconductor fabrication plant structure using the same, and a wafer transporting method are provided to minimize a space for installing semiconductor manufacturing equipment by forming a three dimensional multi-storied structure of a semiconductor fabrication plant.;CONSTITUTION: A plurality of processing chamber modules(200) is formed on each layer of a multi-storied structure. An elevation channel(110) transfers vertically a wafer transferring box in which wafers are loaded. A semiconductor fabrication plant structure includes a wafer station(300) in order to load wafer cassettes into the wafer transferring box and unload the wafer cassettes from the wafer transferring box.;COPYRIGHT KIPO 2010