HIGH-PERFORMANCE PIEZOELECTRIC THICK FILM CONTAINING ROOM TEMPERATURE CONDUCTING FILM AND PREPARTION METHOD THEREOF

摘要

PURPOSE: A high-performance piezoelectric thick film containing a room temperature conducting film and preparation method thereof are provided to prevent an oxidation of a metallic board in annealing process by depositing a conductivity oxide thick film on the substrate through an aerosol deposition. CONSTITUTION: In a high-performance piezoelectric thick film containing a room temperature conducting film and preparation method thereof, a room temperature conductive film is included between a metallic substrate and a PZT system piezoelectric thick film. The metal substrate is one of titanium, a stainless steel, a copper, a nickel and a nickel alloy, and the PZT system thick film is included of the Pb1+ a(Zrb,Ti1-b) O3 composition: an a has a range of 0.1 to 0 and b the range of 0.7 to 0.3. The PZT system piezoelectric thick film has the thickness of 0.1-100um.