COATING STRUCTURE OF METAL RESONATOR FOR ELECTRODELESS ILLUMINATION SYSTEM INCLUDING METAL OXIDE LAYERS SUCCESSIVELY LAMINATED ON METAL LAYER

摘要

PURPOSE: A coating structure of a metal resonator for an electrodeless illumination system is provided to prevent discoloring of metal oxide layers by stacking metal oxide layers on a metal layer successively.;CONSTITUTION: A coating structure of a metal resonator for an electrodeless illumination system comprises a reflecting layer(22) and a heat-resistant layer(23). The reflecting layer is formed on a top surface(21) of a resonator. The reflecting layer is formed with at least one of Al, Ni, No, Ag and Cr. The heat-resistant layer is formed on the reflecting layer. The heat-resistant layer is formed by repeating a SiO2 layer and an Al2O3 layer at least 1 time.;COPYRIGHT KIPO 2010