A METHOD OF MANUFANTURING A GRAYTONE MASK, THE GRAYTONE MASK AND A GRAYTONE MASK BLANK

摘要

PURPOSE: A gray tone mask manufacturing method, a gray tone mask, and a gray tone mask blank are provided to suppress a progress of side etching of a light blocking layer exposed by a section during an etching process. CONSTITUTION: A gray tone mask comprises a light blocking layer pattern(22a), formed on a transparent substrate(21), and a transflective layer pattern(24a). A gray tone mask includes a pattern composed by a light blocking unit, a transflective unit and a transmissive unit. The light blocking unit is formed by a light blocking layer(22) of at least light blocking layer pattern. The transflective unit is formed by a transflective layer(24) formed in a substrate exposure unit of the light blocking layer pattern of the transflective layer pattern.