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APPARATUS AND A METHOD FOR MANUFACTURING A SEMICONDUCTOR SINGLE CRYSTAL AN INGOT USING CUSP MAGNETIC FIELD, USING CUSP MAGNETIC FIELD TO INCREASE THE PULL RATE OF SINGLE CRYSTAL WITHOUT A DEFECT
APPARATUS AND A METHOD FOR MANUFACTURING A SEMICONDUCTOR SINGLE CRYSTAL AN INGOT USING CUSP MAGNETIC FIELD, USING CUSP MAGNETIC FIELD TO INCREASE THE PULL RATE OF SINGLE CRYSTAL WITHOUT A DEFECT
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机译:利用杯形磁场制造半导体单晶硅的装置和方法,利用杯形磁场提高单晶晶体的无缺陷拉动速率
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摘要
PURPOSE: An apparatus and a method for manufacturing a semiconductor single crystal an ingot using cusp magnetic field are provided to improve the productively of single crystal by securing a process margin.;CONSTITUTION: A semiconductor single crystal ingot manufacturing device comprises magnetic field supply unites(80a, 80b). The magnetic field supply unites are arranged near a crucible(10). The magnetic field supply unites have the center of ZGP(Zero Gauss Plane) of -30mm ~ 60mm in relation to the high level interface. In this case, the central location of ZGP has the vertical component of the magnetic field of 0. The magnetic field supply unites applies a CUSP magnetic field having a R over 1.;COPYRIGHT KIPO 2010
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