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PHOTOELECTRICITY MIXED SUBSTRATE CAPABLE OF NEWLY FORMING AN ALIGNMENT MARK WHICH HAS A MARK TO BE EASILY RECOGNIZED, AND A MANUFACTURING METHOD THEREOF
PHOTOELECTRICITY MIXED SUBSTRATE CAPABLE OF NEWLY FORMING AN ALIGNMENT MARK WHICH HAS A MARK TO BE EASILY RECOGNIZED, AND A MANUFACTURING METHOD THEREOF
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机译:具有易于识别的标记的新形成的对准标记的光电混合基材及其制造方法
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摘要
PURPOSE: A photoelectricity mixed substrate and a manufacturing method thereof are provided to improve light propagation efficiency by newly forming a second alignment mark on the optical element mounting surface of a electric circuit part.;CONSTITUTION: An optical element is formed in an optical waveguide part(2) and an electric circuit part. A photoelectricity mixed substrate comprises an under clad layer(21) formed in an optical waveguide part with the translucency, a linear shaped core(22) for an optical waveguide formed on the surface of the under clad layer, a first alignment mark(24) which is located to the end part of the core, and an over clad layer coating the first alignment mark. A second alignment mark(15) for determining the location of the optical element is formed on the mounting surface of an electric circuit part. The surface of the second alignment mark except for exposure is coated to a resin layer(16). The second alignment mark comprises a metal for an electric circuit.;COPYRIGHT KIPO 2010
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