X AND Y STAGE APPARATUS, A SEMICONDUCTOR INSPECTING APPARATUS, AND A SEMICONDUCTOR EXPOSING APPARATUS, CAPABLE OF IMPROVING THE YAWING PRECISION

摘要

PURPOSE: An X and Y stage apparatus, a semiconductor inspecting apparatus, and a semiconductor exposing apparatus are provided to improve the driving precision of an X-axis moving body by controlling the yawing angle of an Y-axis moving body.;CONSTITUTION: An X-axis moving body(3) moves to an X-axis. An Y-axis moving body(4) guides the move of the X-axis moving body to the X-axis direction. A pair of driving units(14A, 14B) drives the Y-axis moving body to the Y-axis direction. Detecting units(16A, 16B) detect an yawing angle which is an angle of an Z-axis peripheral rotating direction. A control unit controls the driving units.;COPYRIGHT KIPO 2011