Apparatus for edge defect of glass substrate and monitoring process

摘要

An apparatus for inspecting edges of a glass substrate and an inspecting method thereof are provided to enhance efficiency of an inspection process by detecting correctly edge defects of the glass substrate or a panel. An apparatus for inspecting edges of a glass substrate includes a working table(111), a plurality of alignment inspecting cameras(124), a plurality of line scan cameras(125), and a transfer unit. A substrate(10) is loaded on the working table. The alignment inspecting cameras are used for photographing images of alignment marks(11) which are formed on the glass substrate. The line scan cameras are used for inspecting the edges of the glass substrate. The transfer unit controls a position of the working table.