A METHOD FOR PREPARATION OF METAL NANOPARTICLES BY ATOMIC LAYER DEPOSITION

摘要

The present invention relates to a method for producing metal nanoparticles by atomic layer deposition method, according to the present invention is easy to control the size and distribution on any substrate compared to the nanoparticles prepared by the conventional method nanocatalyst or magnetic and nano-rich It can be well applied to various nano functional materials such as metal charge storage layers for gate memory devices.;Nanoparticles, Nanospot Size Control, Atomic Layer Deposition, Nanotubes