SOURCE extreme ultra-violet radiation with a laser plasma at a wavelength of 13.4 NM

摘要

The utility model is intended for use in nanolithography and devices for microscopy or tomography of working in the extreme ultraviolet region with a wavelength of about 13.5 nm. The object of the utility model is to increase the conversion efficiency of the laser radiation in the extreme ultraviolet protection used in Bragg mirrors source of contamination caused by charged particles of the target, as well as saving the power source current solenoids, the magnetic field generating system and protect parts from the magnetic field of mechanical displacements. EUV radiation source with a laser plasma at a wavelength of 13.4 nm, consisting of a target, the collector of the Bragg mirror and the primary laser pulse (sources) with their optical systems focus on the target, characterized in that used as a target rewound, passed through the capillary , thin wire, tin-plated tin-plated or tin alloy (composition) and as a primary laser source using two lasers: a first - relatively short wavelength, Focus vanny on the wire surface, which serves to tin sublimation, generating a plasma cloud and preheating, and the second - the long wavelength, CO ₂ laser for optimal plasma temperature focused over the target directly on the plasma cloud and emitting a light pulse with a predetermined time delay relative to the first laser . In addition, the source along the axis of the wire creates a pulse magnetic field synchronized with the laser pulses and directed therealong, wherein the field is produced within the closed bochenkoobraznogo yoke having holes for the passage of the radiation beams as the primary lasers and extreme ultraviolet radiation that is closed at magnetic field with missing capillary wire therethrough, which are made of magneto-concentrating alloys. In addition, source generated pulsed jet of inert gas directed along the thin wire through the capillary, which is passed through the wire, moreover, the capillary wall is provided with a one-way (non-through) hole for passage to the surface of the first wire (with respect to short-wave) laser pulse.