NOZZLE FOR LASER PLASMA EXTREME ULTRAVIOLET RADIATION SOURCE AND METHOD OF GENERATING EXTREME ULTRAVIOLET RADIATION

摘要

PROBLEM TO BE SOLVED: To provide a nozzle for a laser plasma extreme ultraviolet radiation source using a target material delivery tube. SOLUTION: A laser plasma EUV radiation source 46 provides thermal isolation between a nozzle body 48 and a target material flowing through the nozzle body. The target feeding tube 72 extends by passing through the nozzle body. The delivery tube has an expansive opening 80 positioned at the back of an outlet collimator 50 of the nozzle body. The delivery tube is made of a low heat conductive material such as stainless steel, and comes into limited contact with the nozzle body so that heating of the nozzle body from plasma does not heat the liquid target material fed via the delivery tube. The expansive opening has a diameter smaller than the outlet collimator.