A combined movement sensor for use in feedback - control systems for the purpose of isolating vibrations

摘要

The present invention relates to a method for controlling a vibration isolation system and an active vibration isolation system for the oscillation insulated storage of lithography - devices, wafer - handling systems, and / or scanning microscopes. It is provided for this purpose: a number of vibration signal transducers for the delivery of sensor signals representing vibrations; a number of actuators for vibrational compensation, which, by supplying actuator - control signals can be controlled; a controller which, for processing the sensor signals supplied into the actuator - control signals is formed, wobein the vibration signal transducers at least a geophone sensor as a first acceleration sensor for the detection of oscillations in a first frequency range and at least one second, with respect to the first different acceleration sensor for the detection of oscillations in a second frequency range, which widens the first frequency range have.