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Combined motion sensor for use in feedback control systems for vibration isolation
Combined motion sensor for use in feedback control systems for vibration isolation
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机译:组合式运动传感器,用于反馈控制系统中以隔离振动
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摘要
The present invention relates to a method for controlling a vibration isolation system, and an active vibration isolation system for vibration-isolated support of lithographic devices, wafer handling systems, and/or scanning microscopes. For this purpose the following are provided: a number of vibration transducers for supplying sensor signals which are representative of vibrations; a number of actuators for vibration compensation which may be controlled by supplying actuator control signals; a control device which is designed for processing the supplied sensor signals to form the actuator control signals, wherein the vibration transducers have at least one geophone sensor as a first acceleration sensor for detecting vibrations in a first frequency range, and at least one second acceleration sensor, which is different from the first acceleration sensor, for detecting vibrations in a second frequency range which extends the first frequency range.
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