Physical Characteristics of the Sensing Elements of Feedback Sensors Combined with Thermomechanical Actuators for Plant Micromotion Control Systems

摘要

The paper is devoted to extending the functionality and finding possible applications of microrobotic system components, i.e., actuators based on the thermomechanical effect and used in miniature plant motion control systems. A top metallization layer added to the actuator design creates in its structure a sensing element responsive to humidity, light, and motion. Thus, a single device combines active and sensitive elements and provides feedback thus simplifying the technology and reducing the cost of the multifunctional device.