COATING PRETREATMENT METHOD, DIAMOND FILM COATING METHOD, AND COATING FILM REMOVING METHOD

摘要

PROBLEM TO BE SOLVED: To allow a diamond film to be coated with high bond strength while a surface layer part is appropriately removed even for a complicated surface of large unevenness hard for blasting, and a hole inner surface of large aspect ratio to expose a substantially uniform internal structure.;SOLUTION: In the coating pretreatment at a step S1, a surface of a base material 12 is oxidized with oxygen plasma, and in order to remove its oxide by the ultrasonic cleaning, any sintered skin formed during the permanent sintering is appropriately removed, and the bond strength of the diamond film 18 formed thereon is increased. In the oxidation treatment at a step S1-1, the negative bias voltage is applied to the base material 12, and oxygen plasma of high density is generated substantially uniformly along the surface of the base material 12. A hole inner surface 16 of large aspect ratio is appropriately subjected to oxidation treatment, and the sintered skin is appropriately removed in a short time over the entire surface of the base material 12 including the hole inner surface 16. The diamond film 18 can be removed in a similar treatment.;COPYRIGHT: (C)2011,JPO&INPIT