WAFER PROCESSING METHOD, WAFER PROCESSING SYSTEM, METHOD FOR MANUFACTURING EPITAXIAL WAFER, AND SYSTEM FOR MANUFACTURING THE EPITAXIAL WAFER

摘要

PROBLEM TO BE SOLVED: To provide a wafer processing method that surely detects whether an unprocessed wafer is present, copes with irregular processing such as processing without a wafer, and prevents wafer loss such as transferring the unprocessed wafer to the next process, and also to provide a wafer processing system, and a method and system for manufacturing an epitaxial wafer.;SOLUTION: The wafer processing method is configured such that at least a plurality of wafers are stored in a cassette arranged inside a load lock chamber of a wafer processing device and the wafers are successively transferred from the cassette to a processing chamber so as to execute prescribed processing to the transferred wafers in a sheet feed manner. When the wafers are put into the cassette by a transfer device, the number of times N2 of wafer transfer from the cassette to the processing chamber is counted while counting the number of sheets N1 of wafers that are put into the cassette so as to determine whether N1 matches N2.;COPYRIGHT: (C)2011,JPO&INPIT