MICRO PUMP, MICRO VALVE AND LIQUID-FEED CONTROLLER

摘要

PROBLEM TO BE SOLVED: To provide a micro pump, a micro valve and a liquid-feed controller, which have simple configuration and are manufactured without requiring time and labor.;SOLUTION: The micro pump includes a shape memory alloy sheet 12 having at least one through-hole 11 formed therein, a tubular elastic member 13, electrodes 14, 15 for running the current in the shape memory alloy sheet 12, and a control unit 16 for controlling the current by applying the voltage to the electrodes 14, 15. The elastic member 13 is inserted in and fixed to the through-hole 11 of the shape memory alloy sheet 12.;COPYRIGHT: (C)2012,JPO&INPIT