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Method for manufacturing a bending transducer, a micro pump and a micro valve, micro pump and micro valve
Method for manufacturing a bending transducer, a micro pump and a micro valve, micro pump and micro valve
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机译:弯曲传感器的制造方法,微型泵和微型阀,微型泵和微型阀
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摘要
A method of manufacturing a bending transducer having a drive element and a membrane includes providing the membrane and the drive element and applying a production signal to the drive element during a bonding of the drive element to the membrane such that the drive element is pre-stressed after the bonding, wherein the production signal is of a same kind as an operation signal to operate the bending transducer.
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