GAS CHARGING APPARATUS, GAS DISCHARGING APPARATUS, GAS CHARGING METHOD, AND GAS DISCHARGING METHOD

摘要

PPROBLEM TO BE SOLVED: To provide a gas charging apparatus, gas discharging apparatus, gas charging method and gas discharging method, capable of reliably positioning a container on a mounting table, even in such an apparatus as a nozzle for charging gas into the container or discharging gas therefrom is mounted on the mounting table for mounting the container. PSOLUTION: When a carrier 10 which is a container is mounted on a carrier base 21, a kinematic pin 7 engages with a positioning groove 101 provided in the bottom 103 of a carrier 10, and the carrier 10 is positioned on the mounting table 2. From this state, a rise and fall drive unit 4 drives a charging nozzle 5 to come into contact with the charging unit 102 of the carrier 10. Consequently, the charging nozzle 5 is never caught in the charging unit 102 of the carrier 10 before the carrier 10 is positioned on the mounting table 2. Thereby, the carrier 10 can reliably be positioned on the mounting table 2. PCOPYRIGHT: (C)2011,JPO&INPIT