WAFER TRANSPORTATION INSPECTION EQUIPMENT TABLE AND WAFER TRANSPORTATION INSPECTION METHOD

摘要

PROBLEM TO BE SOLVED: To improve precision in wafer inspection.;SOLUTION: A wafer transportation inspection equipment table includes a first transportation unit on which a wafer is placed for wafer transfer, a second transportation unit which adjoins the first transportation unit, receives the wafer transported by the first transportation unit, and transfers the wafer placed thereon, an inspection unit for inspecting the wafer on the second transportation unit, and a driving device which is connected to the inspection unit and moves the inspection unit on the second transportation unit. When the second transportation unit temporarily stops transportation of the wafer, the inspection unit inspects the wafer on the second transportation unit while the driving device moves the inspection unit.;COPYRIGHT: (C)2011,JPO&INPIT