COOLANT FOR CUTTING CRYSTAL SILICON AND METHOD FOR CUTTING CRYSTAL SILICON BY USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a coolant for cutting crystal silicon which has high cooling effect and can prevent the production of silica sol even when using a wire saw with a wire, on which diamond is stuck, in the case of cutting the crystal silicon.;SOLUTION: The coolant for cutting the crystal silicon is obtained by using water as a principal component, and adding a water-soluble oxidizing agent such as hydrogen peroxide thereto. It is preferable that a rust-preventive such as benzotriazol, tolyl triazol, 2-mercapto benzothiazol, 3(2-(benzothiazolyl)thio) propionic acid or polycarboxylic acid is blended, and it is more preferable that an amino compound is added.;COPYRIGHT: (C)2011,JPO&INPIT