FRINGE SCANNING INTERFERENCE FRINGE MEASURING METHOD, AND INTERFEROMETER

摘要

PROBLEM TO BE SOLVED: To facilitate quick and highly-accurate shape measurement by using a simple constitution, concerning a fringe scanning interference fringe measuring method and an interferometer.;SOLUTION: The fringe scanning interference fringe measuring method acquires n interference fringe images by shifting one phase increment Δϕ at a time and calculates the shape of a surface to be measured. The method includes: a candidate image acquisition step (step S1) of acquiring a candidate image by being shifted by a phase amount for subdividing the phase increment Δϕ; a brightness change acquisition step (step S2) of acquiring a brightness change on the same position of each candidate image; a phase change calculation step (step S3) of calculating a phase change by using the brightness change; a selection process of an image for interpolation operation (step S4) of selecting as the image for interpolation operation, a plurality of peripheral candidate images having respective phase amounts shown as Δϕ(k-1) (k=1, ..., n); and an interference fringe image calculation step (step S5) of calculating n interference fringe images, by performing interpolation operation by using the image for interpolation operation.;COPYRIGHT: (C)2011,JPO&INPIT