PROBLEM TO BE SOLVED: To provide an interferometer alignment system for determining interference fringe image data from a display, while dispensing with time for switching between two display screens of a moire fringe images and of an interference fringe image and the costs for preparing the two display screens, and easily checking the contrast of the interference fringes, the measurement area, and the generating status of noise.;SOLUTION: This interferometer alignment system is equipped with an interferometer for forming interference fringes by means of reflected light reflected from a reference surface and of reflected light from a surface under inspection, an image-receiving part for receiving the interference fringes, a reference fringe image storage part stored with a reference fringe image, a calculation part for forming a moire image, by superposing an interference fringe image having specific color components among interference fringes received by the receiving part on the reference fringe image, an output part for displaying the moire image superposed on the interference fringe image of color components other than the specific color components, a determination part for determining whether the moire image is monochromatic, and an adjustment part for adjusting the inclination of the reference surface on receiving a control signal from the determination part, when the moire image is determined as not being monochromatic by the determination part.;COPYRIGHT: (C)2005,JPO&NCIPI
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