MINUTE SAMPLE STAND, SUBSTRATE FOR FORMING THE MINUTE SAMPLE STAND, METHOD FOR MANUFACTURING THE MINUTE SAMPLE STAND, AND ANALYZING METHOD USING THE MINUTE SAMPLE STAND

摘要

PROBLEM TO BE SOLVED: To provide a minute sample stand capable of sharply reducing the background noise at analyses.;SOLUTION: The minute sample stand 100 has a minute sample loading membrane 20 formed to and integrated with one side of a minute sample stand base part 10 consisting of a semiconductor substrate. The minute sample stand base part 10 has a V-shaped groove 11, and the minute sample loading membrane 20 has the upper end surface 21, provided between the upper surface of the groove 11 and the deepest part of the groove 11. The part between the upper surface 13 of the minute sample stand base part 10 and the upper end surface 21 of the minute sample loading membrane 20 serves as the guard part of a minute sample 70.;COPYRIGHT: (C)2011,JPO&INPIT