The sample stand where the minute region analytical device which uses the focus ion beam and the minute region analytical methodological null

摘要

PROBLEM TO BE SOLVED: To simply, quickly, and precisely measure a temperature of an analyzed part on a sample surface in analyzing behaviors of elements in the analyzed part on the sample surface.SOLUTION: In the minute part analyzer using the focused ion beam, Ga whose ion kind is Ga is poured on a surface of a sample 4 by pre-radiating Ga focused ion beam 3 to make it a reference element for measuring a surface temperature of the sample 4, and the temperature of the minute part on the surface of the sample 4 during analysis is determined. Yield of a secondary Ga ion emitted from the sample 4 is measured by pre-radiating the fixed amount of Ga focused ion beam 3 to the sample 4 at every appropriate surface temperature of the sample 4 in advance to obtain a relation of the yield of the secondary Ga ion with the surface temperature of the sample 4. Once this relation is examined, the temperature at the minute part on the surface of the sample 4 can be determined by measuring the yield of the secondary Ga ion when analyzing the plurality of samples 4.