MINUTE SAMPLE STAND, SUBSTRATE USED FOR MANUFACTURING THE MINUTE SAMPLE STAND, METHOD FOR MANUFACTURING THE MINUTE SAMPLE STAND AND ANALYZING METHOD USING THE MINUTE SAMPLE STAND

摘要

PROBLEM TO BE SOLVED: To provide a minute sample stand capable of achieving the enhancement of productivity and easy to miniaturize.;SOLUTION: The minute sample stand 100 is formed of a silicon semiconductor substrate as a whole and a minute sample loader 20 is formed in the recess 11 of a minute sample stand base 10. Accordingly, the minute sample loader 20 is formed so as to become thinner than the minute sample stand base 10. Since a large number of the minute sample stands 100 can be manufactured from one semiconductor wafer, if separated from the semiconductor wafer, the enhancement of productivity can be achieved, and the miniaturization of the minute sample stand 100 becomes possible.;COPYRIGHT: (C)2011,JPO&INPIT