The optical axis deflection die laser interferometer, the proofreading manner, amendment manner, and the standard sphere which

摘要

PROBLEM TO BE SOLVED: To calibrate a displacement gage for correcting the errors of an optical axis direction due to motion precision of a two-axis rotation mechanism to a reference sphere of an optical axis deviation type laser interferometer without preparing specific calibration device to secure traceability.;SOLUTION: The optical axis deviation type laser interferometer has the reference sphere 34 of measurement, a recursive reflection means 12 arranged on a measuring object 10, a laser interference length measuring machine 20 for measuring a distance with the recursive reflection means 12 and the rotation mechanism 30 for rotating the reference sphere 34 as a center. The interferometer regards a center coordinate of the reference sphere 34 as a reference and measures the distance with the recursive reflection means 12 in which optical axes of emission light from the laser interference length measuring machine 20 mounted on the rotation mechanism 30 and return light are parallel. The interferometer is provided with the displacement gages 50R and 50L for measuring errors due to relative motion of the reference sphere 34 and the laser interference length measuring machine 20 and a mechanism 52 for being displaced in a direction of the measurement optical axis to the reference sphere 34 as the relative position relationship of the laser interference length measuring machine 20 and the displacement gages 50R and 50L are held.;COPYRIGHT: (C)2008,JPO&INPIT