A pinch-off voltage measurement circuit and a method of manufacturing the transistor, a method of manufacturing a field effect transistor

摘要

PROBLEM TO BE SOLVED: To provide a pinch-off voltage measuring circuit for a transistor with improved measurement accuracy, its manufacturing method, and an field- effect transistor manufacturing method capable of highly accurately controlling VTH. SOLUTION: The pinch-off voltage measuring circuit for a transistor for measuring the pinch-off voltage of a field-effect transistor and its manufacturing method comprise a channel layer 2 including the same impurity as the channel forming region of the field-effect transistor and anode-side and cathode-side gate conduction layers 5 which form p-n junctions with the channel layer 2. The p-n junction J1 between the anode-side gate conduction layer and channel layer has characteristics of a larger leak current than the cathode-side p-n junction J2. In the field-effect transistor manufacturing method, a field-effect transistor which comprises the measuring circuit on the same substrate is manufactured.