Method, and the wave front aberration measurement system which produce the lattice and that lattice for EUV emission

摘要

The lattice for EUV emission includes the plural reflected lines. Each reflected line includes the plural 1st reflected points and the plural 2nd reflected points which are arranged between each other. The 1st reflected point and the 2nd reflected point is formed, in order the degree of 180 10 (mod 360 degree) to reflect EUV emission in mutual phase difference. Selective figure Figure 11A