Latent sub-wavelength lattice structure producing method for producing sub-wavelength lattice, involves selecting interference pattern and function structure such that lattice structure with period less than minimum wavelength is produced

摘要

The method involves producing a lattice structure that has a lower period than minimum wavelength as an interference pattern and exposing the structure in a pre-determined area of a resist layer. A function structure having a larger period than the minimum wavelength is exposed in the layer. The pattern and the function structure are selected such that the lattice structure having a period less than the minimum wavelength is produced. An independent claim is also included for a sub-wavelength lattice for electromagnetic radiation.