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Method for producing a curvature distribution crystalline lens, a polarization controller, X-ray reflectivity measurement equipment and the X-ray reflectivity measurement method
Method for producing a curvature distribution crystalline lens, a polarization controller, X-ray reflectivity measurement equipment and the X-ray reflectivity measurement method
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机译:曲率分布晶状体的制造方法,偏光控制器,X射线反射率测定装置及X射线反射率测定方法
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摘要
Inclination to the crystal surface of the crystal lattice plane to satisfy the diffraction condition of the Johansson when it is plastically deformed by hot pressing is sandwiched between the members semiconductor single crystal plate Si, Ge, such as GaAs is embossed, semiconductor single crystal a preliminary polishing step of polishing the one side on the plate member pushing convex type with a second convex curved surface obtained by rotating a focusing circle, and the crystal of the semiconductor single crystal plate satisfying the diffraction condition for Johansson surface between the member and faces the second curved surface of the member the polished surface pushes the convex type, unpolished pressed concave type having a quadratic surface of concave curvature grid must satisfy the pushing member concave type The sandwiched semiconductor single crystal panel facing the quadratic surface, and plastically deforming under high temperature and pressure. Thus, it is possible to efficiently create a curvature distribution crystalline lens.
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