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Method for producing a curvature distribution crystalline lens, a polarization controller, X-ray reflectivity measurement equipment and the X-ray reflectivity measurement method

机译:曲率分布晶状体的制造方法,偏光控制器,X射线反射率测定装置及X射线反射率测定方法

摘要

Inclination to the crystal surface of the crystal lattice plane to satisfy the diffraction condition of the Johansson when it is plastically deformed by hot pressing is sandwiched between the members semiconductor single crystal plate Si, Ge, such as GaAs is embossed, semiconductor single crystal a preliminary polishing step of polishing the one side on the plate member pushing convex type with a second convex curved surface obtained by rotating a focusing circle, and the crystal of the semiconductor single crystal plate satisfying the diffraction condition for Johansson surface between the member and faces the second curved surface of the member the polished surface pushes the convex type, unpolished pressed concave type having a quadratic surface of concave curvature grid must satisfy the pushing member concave type The sandwiched semiconductor single crystal panel facing the quadratic surface, and plastically deforming under high temperature and pressure. Thus, it is possible to efficiently create a curvature distribution crystalline lens.
机译:当通过热压使其塑性变形时,满足晶格平面的晶面的倾斜以满足Johansson的衍射条件被压在GaAs等半导体单晶板Si,Ge之间,半导体单晶初步被夹在中间。抛光步骤是在板件推凸型的一侧上抛光具有通过旋转聚焦圆而获得的第二凸曲面的一侧,并且满足该部件之间的约翰逊表面的衍射条件的半导体单晶板的晶体面向第二部件的弯曲表面,抛光表面推动凸面型,具有凹曲率网格的二次表面的未抛光压制凹面类型必须满足推动部件凹面型。压力。因此,可以有效地制造曲率分布晶体透镜。

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