Using the energy distributed x-ray analytical instrument which is installed in the scanning-type electron microscope in order to measure the mannered

摘要

PPROBLEM TO BE SOLVED: To provide a method for measuring the distribution density of detected components on the cross section of solid material for measurement. PSOLUTION: The method for measuring the distribution density of detected components on the cross section of solid material for measurement comprises a process for preparing a plurality of calibration curve formation samples with varying densities of detected components by mixing and molding powder samples and detected components in powder form at varying densities, the powder samples containing no detected components; a process for measuring the X-ray intensities of specific elements in the detected components of each of the calibration curve formation samples; a process for creating calibration curves about the measurements of the specific elements in the detected components based on the densities of the detected components in each of the samples and on the X-ray intensities; and a process for measuring the distribution densities of the detected components on the cross section of the solid material for measurement by measuring the X-ray intensities of the specific elements in the detected components at each position on a certain straight line on the cross section of the solid material for measurement, and converting the X-ray intensities into the densities of the detected components by means of the calibration curves. PCOPYRIGHT: (C)2007,JPO&INPIT