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Work gap adjustment method, manufacturing method of the work gap adjusting device, a droplet ejection apparatus and an electro-optical device

机译:工作间隙调整方法,工作间隙调整装置的制造方法,液滴喷射装置及电光装置

摘要

PROBLEM TO BE SOLVED: To provide a method of adjusting a work gap and an apparatus for adjusting the work gap by which the precision of the work gas in the introduction of a functional liquid droplet discharge head on a work is improved.;SOLUTION: The method of adjusting the work gap of a droplet discharge apparatus 1 for carrying out plotting on the upper surface of the work W by a full line system is provided with a gap measuring step for measuring the work gap Gw between the nozzle surface 83 of the functional liquid droplet discharge head 62 and the upper surface of the work W in each head unit 61 present in a plotting area 31 and a gap adjusting step for adjusting the work gap Gw so that the work gap Gw has a prescribed interval based on the measured result in the gap measuring step in each head unit 61.;COPYRIGHT: (C)2006,JPO&NCIPI
机译:解决的问题:提供一种调节工作间隙的方法和一种用于调节工作间隙的装置,通过该方法和装置,可以提高在将功能性液滴排出头引入工件上时工作气体的精度。调整液滴排出装置1的工作间隙的方法,该方法用于通过全线系统在工件W的上表面进行绘制,并设有间隙测量步骤,该间隙测量步骤用于测量功能件的喷嘴表面83之间的工作间隙Gw。液滴排出头62和存在于标绘区域31中的每个头单元61中的工件W的上表面和用于根据测量结果调整工件间隙Gw以使其具有预定间隔的间隙调整步骤在每个头单元61的间隙测量步骤中进行。版权所有:(C)2006,JPO&NCIPI

著录项

  • 公开/公告号JP4691975B2

    专利类型

  • 公开/公告日2011-06-01

    原文格式PDF

  • 申请/专利权人 セイコーエプソン株式会社;

    申请/专利号JP20040355928

  • 发明设计人 安 永植;

    申请日2004-12-08

  • 分类号B05D1/26;B05C5/00;B05C11/00;B05D3/00;B41J2/01;G02B5/20;H05B33/10;H01L51/50;

  • 国家 JP

  • 入库时间 2022-08-21 18:18:18

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