Method for manufacturing a gap adjusting device, the calibration jig used for this, and the gap adjustment apparatus droplet ejection device with a, and the electro-optical device

摘要

PROBLEM TO BE SOLVED: To provide a gap adjusting device or the like capable of adjusting a work gap to the smallest value as possible by accurately measuring the positional deviation of a nozzle surface in an up-and-down direction.;SOLUTION: The gap adjusting device is equipped with a position measuring means 181 measuring each of the position in the up-and-down direction of a plurality of spots 106 separate from each other on the nozzle surface 103, a gap measuring system moving mechanism 24 moving a functional droplet discharging head 81 with respect to the measuring means 181, an elevating means 132 moving the head 81 in the up-and-down direction with respect to a work W and finely adjusting the work gap, and a control means 3 controlling the elevating means 132 based on the result of measurement by the measuring means 181. The control means 3 controls the elevating means 132 so that a distance between the nearest position in a plurality of results of measurement by the measuring means 181 and the surface of the work W may be the set work gap.;COPYRIGHT: (C)2005,JPO&NCIPI