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Blue-violet laser light-sensitive composition, blue-violet laser for image-forming material and a blue-violet laser for image forming material

机译:蓝紫色激光感光组合物,用于成像材料的蓝紫色激光器和用于成像材料的蓝紫色激光器

摘要

PROBLEM TO BE SOLVED: To provide a blue-violet laser sensitive composition which excels in sensitivity to blue-violet laser light and in developability and ensures easy stripping and removal of a resist image after resist processing when used for resist image formation, and which is free from edge fusion even if stored in a roll shape as a dry film material.;SOLUTION: The blue-violet laser sensitive composition contains (A) an alkali-soluble resin containing (meth)acrylates represented by formula (I) as copolymerized components, wherein R1 represents H or methyl and R2 represents a saturated or unsaturated hydrocarbon group containing a tertiary carbon atom and/or a quaternary carbon atom, (B) an ethylenically unsaturated compound, (C) a photopolymerization initiator and (D) a sensitizing dye having an absorption maximum in a wavelength region of 355-430 nm.;COPYRIGHT: (C)2007,JPO&INPIT
机译:解决的问题:提供一种蓝紫色激光敏感组合物,该组合物对蓝紫色激光的敏感性和显影性优异,并且当用于抗蚀剂图像形成时,确保在抗蚀剂处理后容易剥离和去除抗蚀剂图像。解决方案:蓝紫色激光敏感组合物包含(A)碱溶性树脂,该碱溶性树脂含有式(I)表示的(甲基)丙烯酸酯作为共聚成分,其中R 1 代表H或甲基,R 2 代表含有叔碳原子和/或季碳原子的饱和或不饱和烃基,(B)烯键式不饱和化合物;(C)光聚合引发剂;(D)在355-430 nm波长范围内具有最大吸收的敏化染料。版权所有:(C)2007,JPO&INPIT

著录项

  • 公开/公告号JP4679213B2

    专利类型

  • 公开/公告日2011-04-27

    原文格式PDF

  • 申请/专利权人 三菱化学株式会社;

    申请/专利号JP20050113799

  • 发明设计人 亀山 泰弘;

    申请日2005-04-11

  • 分类号G03F7/033;G03F7/027;G03F7/031;G03F7/029;G03F7/004;H01L21/027;

  • 国家 JP

  • 入库时间 2022-08-21 18:17:03

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