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BLUE-VIOLET LASER SENSITIVE COMPOSITION, IMAGE FORMING MATERIAL FOR BLUE-VIOLET LASER AND IMAGING MATERIAL FOR BLUE-VIOLET LASER

机译:蓝紫色激光的敏感成分,蓝紫色激光的图像形成材料和蓝紫色激光的成像材料

摘要

PROBLEM TO BE SOLVED: To provide a blue-violet laser sensitive composition which excels in sensitivity to blue-violet laser light and in developability and ensures easy stripping and removal of a resist image after resist processing when used for resist image formation, and which is free from edge fusion even if stored in a roll shape as a dry film material.;SOLUTION: The blue-violet laser sensitive composition contains (A) an alkali-soluble resin containing (meth)acrylates represented by formula (I) as copolymerized components, wherein R1 represents H or methyl and R2 represents a saturated or unsaturated hydrocarbon group containing a tertiary carbon atom and/or a quaternary carbon atom, (B) an ethylenically unsaturated compound, (C) a photopolymerization initiator and (D) a sensitizing dye having an absorption maximum in a wavelength region of 355-430 nm.;COPYRIGHT: (C)2007,JPO&INPIT
机译:解决的问题:提供一种蓝紫色激光敏感组合物,该组合物对蓝紫色激光的敏感性和显影性优异,并且当用于抗蚀剂图像形成时,确保在抗蚀剂处理后容易剥离和去除抗蚀剂图像。解决方案:蓝紫色激光敏感组合物包含(A)碱溶性树脂,该碱溶性树脂含有式(I)表示的(甲基)丙烯酸酯作为共聚成分,其中R 1 代表H或甲基,R 2 代表含有叔碳原子和/或季碳原子的饱和或不饱和烃基,(B)烯键式不饱和化合物;(C)光聚合引发剂;(D)在355-430 nm波长范围内具有最大吸收的敏化染料。版权所有:(C)2007,JPO&INPIT

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