METHOD FOR MANUFACTURING AN ELASTIC BODY OF Al2O3 CERAMIC, MEASURING MEMBRANE FOR A PRESSURE SENSOR AND PRESSURE SENSOR WITH SUCH A MEMBRANE

摘要

A method for manufacturing an elastic deformation body made of an Al₂O₃ ceramic, according to which a highly pure alumina having at most 2000 ppm MgO, at most 200 ppm inorganic impurities, a specific surface of at least 10 m²/g, an average grain size of at most 0.3 μm is applied. With the alumina and additives, there is produced via aqueous processing a homogeneous mixture, from which a pressable spray granulate is produced, which is formed by means of a uniaxial pressing method to a homogeneous, green body, which is subjected to a sinter process. The resulting elastic deformation body has a bending fracture stress σ_c, whose distribution F(σ_c) is given by the Weibull parameters σ₀≧800 MPa and m≧24, with an average grain size of the sintered material of no more than 2 μm, and wherein the sintered material of the deformation body has a density of not less than 3.98 g/cm³.