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ALTERNATIVE PIXEL SHAPE FOR UNCOOLED MICRO-BOLOMETER

机译:不可旋转微滴定仪的替代像素形状

摘要

An infrared imaging system including a substrate, a plurality of hexagonal shaped micro-bolometer pixels combined to define a focal plane array. Each pixel is electrically connected to the substrate with a pair of opposing isolation legs. One end of the isolation leg is attached to the pixel's periphery while the other is fixed to that substrate so that the focal plane array and a plane containing the substrate have a parallel, spaced-apart relationship. In this manner, the isolation legs provides an electrical communication path from each pixel to the substrate as each pixel undergoes an internal change in resistance due to absorption of infrared energy. At the same time, the legs separate the pixels from the substrate so that there is no heat transfer between the pixel and the substrate due to direct contact. The hexagonal shape arrangement also allows for a staggered arrangement of adjacent rows in the array, thereby increasing the fill factor for the focal plane array of the device. The addition of stepped areas to the hexagonal pixel provides for improved energy absorption through increase in area and multiple coupling of resonant cavities between the pixel and the substrate.
机译:一种红外成像系统,包括基板,多个六角形的微型辐射热计像素,这些像素组合在一起以定义焦平面阵列。每个像素通过一对相对的隔离脚电连接到基板。隔离脚的一端连接到像素的外围,而另一端固定到该基板,以便焦平面阵列和包含基板的平面具有平行的,间隔开的关系。以此方式,当每个像素由于吸收红外能量而经历电阻的内部变化时,隔离腿提供从每个像素到基板的电连通路径。同时,腿部将像素与基板分开,从而由于直接接触而在像素与基板之间没有热传递。六边形形状布置还允许阵列中相邻行的交错布置,从而增加了器件焦平面阵列的填充系数。通过将面积增加以及像素和基板之间的谐振腔的多次耦合,将阶梯状区域添加到六角形像素可改善能量吸收。

著录项

  • 公开/公告号US2011240859A1

    专利类型

  • 公开/公告日2011-10-06

    原文格式PDF

  • 申请/专利权人 A. WAYNE ANTESBERGER;

    申请/专利号US20100753204

  • 发明设计人 A. WAYNE ANTESBERGER;

    申请日2010-04-02

  • 分类号G01J5/20;G01J5/02;

  • 国家 US

  • 入库时间 2022-08-21 18:12:15

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