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POSITIONING AND SWEEPING MECHANICAL LINEAR DISPLACEMENT SYSTEM FOR NANOMETRIC RESOLUTIONS.
POSITIONING AND SWEEPING MECHANICAL LINEAR DISPLACEMENT SYSTEM FOR NANOMETRIC RESOLUTIONS.
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机译:用于纳米分辨率的定位和扫掠机械线性位移系统。
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摘要
The present invention refers to a mechanical linear displacement system for obtaining resolution, stability and repeatability of the nanometric order. The system may be applied for performing bi-dimensional and three-dimensional sweeps.
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