ROTATABLE, HEATABLE PLACEMENT TOOL AND CHIP MOUNTING SYSTEM COMPRISING SUCH A PLACEMENT TOOL

摘要

ROTATABLE, HEATABLE PLACE TOOL AND DIE BONDER COMPRISING SUCH A PLACE TOOLAbstractA place tool which is movable in a direction of a z-axis perpendicular to a substrate com prises: a holding element for a die, wherein the holding element comprises a heating element; a receptacle for the holding element, said receptacle being rotatably mounted at the place tool with respect to z-axis and comprising an insulating body made of heat insulating material; driving means for the receptacle, said driving means capable of ro tating the receptacle around the z-axis; and a supply for a cooling fluid by means of which the receptacle for the holding element may be cooled.Fig. 1